Kla tencor profiler manual

KLA Tencor P-6 Surface Profilometer. For Training please contact Dave Heemstra – dheemstr@www.doorway.ru three vertical ranges that best match the profile to be measured. The system is equipped with a 2 um radii tip for measurement applications. The P-6 is routinely calibrated onsite with , and Angstrom. Operating the KLA P7 stylus profiler. Overview. The KLA P-7 is a stylus contact profiler capable of mm scan lengths with ~10A resolution and ~20A noise floor. It has a multi- capacitor head that can dynamically adjust stylus force and sensitivity. It has a software controlled motorized stage with vacuum chuck which rides on a 12” optical. Instructions for P surface profiler Surface profiler software Profiler Version runs on Windows NT operating system. The program has three main subsets of screens: 1. Catalog screen allows manipulation of the recipe and data files. 2. XY screen shows the video image of the sample and allows manipulation of the sample stage. It also allows to take and save video .

KLA Instruments ™ Tencor ™ P-Series stylus profilometers offer pattern recognition capability for automated surface analysis. This application note describes pattern recognition and its usage for automated sample alignment for the Tencor P-7, P, P, and HRP profilometers. three vertical ranges that best match the profile to be measured. The system is equipped with a 2 um radii tip for measurement applications. The P-6 is routinely calibrated onsite with , and Angstrom VLSI reference standard to ensure system performance. The system has adjustable scan speeds and stylus. 2 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide KT Automation System Operation The KT Automation System provided by KLA-Tencor is used to deploy and manage instrumented wafers in a semiconductor wafer fab to enable real-time measurement and monitoring of parameters that are critical to fab yield and productivity.

Consult KLA - TENCOR's P Stylus Profiler brochure on DirectIndustry. Page: 1/2. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high The system includes manual theta stage with stops at 45 increments and a fine. KLA-TENCOR P PROFILER consisting of: Model: P - Manual wafer load profilometer - Max wafer size: 8"/mm - Computer controlled.